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Numerical enhancements of the microwave resonant cavity method for plasma diagnostics
Autoři | |
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Rok publikování | 2019 |
Druh | Článek v odborném periodiku |
Časopis / Zdroj | PLASMA SOURCES SCIENCE & TECHNOLOGY |
Fakulta / Pracoviště MU | |
Citace | |
www | https://iopscience.iop.org/article/10.1088/1361-6595/ab4300/meta |
Doi | http://dx.doi.org/10.1088/1361-6595/ab4300 |
Klíčová slova | numerical model; resonator; microwave; plasma diagnostics; plasma density; discharge profile; mode stability |
Popis | Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries. |
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