Informace o publikaci
Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model
| Autoři | |
|---|---|
| Rok publikování | 2022 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Surface and Coatings Technology |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751 |
| Doi | http://dx.doi.org/10.1016/j.surfcoat.2022.128954 |
| Klíčová slova | Test particle Monte Carlo; PVD; Antenna effect; Edge effect; Vacuum arc; Simulation; Model |
| Popis | This work presents a novel particle-based computational model capable of predicting coating distribution and composition on real parts in ion-based physical vapor deposition (PVD) processes. The model treats ions as particles (using test particle Monte Carlo method) and electrons as a fluid (using Boltzmann's relation). This combination makes it possible to simulate a realistic plasma sheath around a coated part and locally enhanced electric field around the part's edges. This simulation tool is instrumental especially in predicting the so-called “antenna-effect” - i.e. changes in coating thickness and composition near sharp edges of coated parts. It can also be used for quantifying the effect of coater loading or fixture design, as illustrated by simulating the effect of a top-plate on the coating distribution. The model is validated by two experimental data sets - a milling tool and a drill bit, both coated by hard nitride coatings in a vacuum arc process. |
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