Informace o publikaci
Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates
| Autoři | |
|---|---|
| Rok publikování | 2009 |
| Druh | Článek ve sborníku |
| Konference | Frontiers in Low Temperature Plasma Diagnostic 8 |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika pevných látek a magnetismus |
| Klíčová slova | Mechanical Properties; Diamond-like Carbon; Coatings; Polymer Substrates |
| Popis | We focused our work on optimizing the deposition parametres to improve the coatings adhesion to the polymer surface. Hzdrogenate amorphous carbon (a-C:H) and nitrogen incorporated hzdrogenated amorphous carbon (a-C:H:N) films were deposited on polycarbonate, glass reinforced PPS, and BMC substrates by r.f. plasma enhanced chemical vapor deposition (PECVD) A mixture of hexamethyldisiloxane (HMDSO) and CH4/N2/H2 gases was utilized to reduce the internal compressive stress of the deposited films. |
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