Project information
Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
- Project Identification
- GA202/98/0988
- Project Period
- 1/1998 - 1/2000
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Cooperating Organization
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Institute of Scientific Instruments of the ASCR, v. v. i.
- Responsible person RNDr. Pavel Pokorný
- Responsible person prof. RNDr. Miloslav Ohlídal, CSc.
Within both perturbation and diffraction theories new theoretical approaches enabling us to express optical quantities of multilayer systems with randomly rough boundaries will be formulated. These quantities will be connected with coherently and incoher ently scattered light. The theoretical results will be compared with experimental results achieved for chosen rough multilayer systems. Analytical methods allowing a determination of the optical and statistical parameters of the systems mentioned will be developed. Moreover, a comparison of the new theoretical approach developed within the perturbation theory with approaches employed in the X-ray region will be carried out. Possibilities concerning an extension of this optical approach to the X-ray regi on will also be investigated. A combination of optical and X-ray methods will be used for analyzing various thin film systems.
Publications
Total number of publications: 34
2004
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Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry
Thin Solid Films, year: 2004, volume: 455-456, edition: 1
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Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry
Thin Solid Films, year: 2004, volume: 455-456, edition: 1
2001
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Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy
Surface and Interface Analysis, year: 2001, volume: 32, edition: 1
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Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances
Vacuum, year: 2001, volume: 61, edition: 1
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Měření základních statistických veličin náhodné povrchové drsnosti pomocí mikroskopie atomové síly
Československý časopis pro fyziku, year: 2001, volume: 51, edition: 1
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Optical Characterization of Diamond-like Carbon Films
Vacuum, year: 2001, volume: 61, edition: 2-4
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Optical characterization of DLC:Si films prepared by PECVD
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances
Applied Optics, year: 2001, volume: 40, edition: 31
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Vliv diskrétní Fourierovy transformace na zpracování AFM dat
Československý časopis pro fyziku, year: 2001, volume: 51, edition: 1
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XPS and Ellipsometric Study of DLC/Silicon Interface
Vacuum, year: 2001, volume: 61, edition: 2-4