Diffuse coplanar surface barrier discharge for cleaning and activation of glass substrate

• Authors: ŠTĚPÁNOVÁ Vlasta; SKÁCELOVÁ Dana; SLAVÍČEK Pavel; ČERNÁK Mirko
• Year of publication: 2012
• Type: Article in Periodical
• Magazine / Source: Chem. listy
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: barrier discharge; DCSBD; plasma cleaning
• Description: Diffuse coplanar surface barrier discharge - DCSBD was used for cleaning and activation of borosilicate glass substrates. Results was studed by AFM.

Related projects

• Surface modification of polymeric materials using non-equilibrium plasma generated by underwater pulsed high voltage discharges
• CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy