Space-filling arrays of three-dimensional epitaxial Ge and Si1-xGex crystals

• Authors: FALUB C.V.; ISA F.; KREILIGER T.; BERGAMASCHINI R.; MARZEGALLI A.; TABOADA A.G.; CHRASTINA D.; ISELLA G.; MÜLLER E.; NIEDERMANN P.; DOMMANN A.; NEELS A.; PEZOUS A.; MEDUŇA Mojmír; MIGLIO L.; VON KÄNEL Hans
• Year of publication: 2012
• Type: Article in Proceedings
• Conference: 2012 International Silicon-Germanium Technology and Device Meeting, ISTDM 2012 - Proceedings
• MU Faculty or unit: Central European Institute of Technology
• Doi: http://dx.doi.org/10.1109/ISTDM.2012.6222457
• Field: Solid matter physics and magnetism
• Keywords: silicon; heteroepitaxy; x-ray diffraction
• Description: The crystalline quality, tilt and strain of the Ge and Si1-xGex crystals were investigated by high resolution X-ray diffraction.

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