Publication details
Evolution of discharge current in high power impulse magnetron sputtering
| Authors | |
|---|---|
| Year of publication | 2013 |
| Type | Article in Proceedings |
| Conference | PAPN 2013: Book of extended abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | HiPIMS; discharge current; magnetron sputtering; optical emission spectroscopy |
| Description | High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented. |
| Related projects: |