Publication details
Surface Engineering of the Hydrogenated DLC (a-C:H) Coatings with Optimized Mechanical Performance
| Authors | |
|---|---|
| Year of publication | 2013 |
| Type | Article in Proceedings |
| Conference | Advanced Materials Research |
| MU Faculty or unit | |
| Citation | |
| web | http://www.scientific.net |
| Doi | https://doi.org/10.4028/www.scientific.net/AMR.816-817.33 |
| Field | Plasma physics |
| Keywords | Hydrogenated DLC (a-C:H); TVA; Mechanical Properties |
| Description | The aim of this contribution is to present the properties of the hydrogenated DLC (a-C:H) films and to study their growth carried out in a special deposition technique based on Gaseous Thermionic Vacuum Arc (G-TVA) method. The mechanical properties were investigated on cross-sectional samples using the Fischerscope HM 2000 depth sensing indentation (DSI) tester. |