Publication details
Využití hydridního PVD-PECVD procesu pro růst nc-TiC/a-C:H vrstev na zařízení s rotačními katodami
| Title in English | Employing hybrid PVD-PECVD process with rotating cylindrical magnetron to grow hard nc-TiC/a-C:H coatings |
|---|---|
| Authors | |
| Year of publication | 2013 |
| MU Faculty or unit | |
| Description | *Reports contains state-of-art, results of research and development, tests, experiments done at 2013 in cooperation and on request of Pivot a.s. company |