Publication details
Antireflexní vrstva (Al2O3/MgF2) pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm
| Title in English | Antireflection coating (Al2O3/MgF2) for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm |
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| Authors | |
| Year of publication | 2014 |
| MU Faculty or unit | |
| Description | *Double-layer antireflection coating (Al2O3/MgF2) for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm |
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