Publication details
HiPIMS and Ni Doping Induced Structure Reinforcement and Phase Change in nc-TiC/a-C:H Coatings
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Year of publication | 2017 |
Type | Conference abstract |
MU Faculty or unit | |
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Description | Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix (nc-TiC/a-C:H) can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. These coatings are usually deposited utilizing direct current magnetron sputtering (DCMS) leading to low ionization of the sputtered titanium. High Power Impulse Magnetron Sputtering (HiPIMS) depositions usually lead to much higher ionization of the sputtered titanium which can alter the deposition process and in turn the properties of the deposited nc-TiC/a-C:H coatings. |
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