Publication details
Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target
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| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | W-B-C coatings in this study were synthesized using magnetron sputtering from a single segmented cylindrical target in an industrial configuration. Advanced segmented target was used to precise controlling chemical composition of coating. The target was composed of W, C, B4C cylindrical segments with same radii but different heights. Highly-inhomogeneous coatings were deposited on various substrates to determine the influence of chemical composition on coatings properties afterwards.The depositions were carried out at 450 °C. |
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