Publication details
Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment
| Authors | |
|---|---|
| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | During the last decade the HiPIMS has shown great promise in the field of reactive thin film deposition. In the reactive HiPIMS (R-HiPIMS), the discharge power is delimited within short energetic pulses which, in addition to an enhanced ionization of the sputtered species, also leads to an enhanced dissociation of the reactive gas molecules resulting in an increasing gas reactivity with the surface, which is ultimately beneficial for the thin film formation. |
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