Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

• Authors: FALUB Claudiu Valentin; HIDA Rachid; MEDUŇA Mojmír; ZWECK Josef; MICHEL Jean-Philippe; SIBUET Henri; SCHNEIDER Daniel; BLESS Martin; RICHTER Jan H.; ROHRMANN Hartmut
• Year of publication: 2017
• Type: Article in Periodical
• Magazine / Source: IEEE TRANSACTIONS ON MAGNETICS
• MU Faculty or unit: Faculty of Science
• Web: http://ieeexplore.ieee.org/abstract/document/7924320/
• Doi: http://dx.doi.org/10.1109/TMAG.2017.2703175
• Field: Solid matter physics and magnetism
• Keywords: FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials
• Description: In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.

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