Publication details

Correlating structural and mechanical properties of AlN/TiN superlattice films

Authors

KOUTNÁ Nikola ŘEHÁK Petr CHEN Zhuo BARTOSIK Matthias FALLMANN Markus CERNY Miroslav ZHANG Zaoli FRIÁK Martin ŠOB Mojmír MAYRHOFER Paul H. HOLEC David

Year of publication 2019
Type Article in Periodical
Magazine / Source Scripta Materialia
MU Faculty or unit

Faculty of Science

Citation
Web Full Text
Doi http://dx.doi.org/10.1016/j.scriptamat.2019.02.021
Keywords Superlattice; Ab initio; TEM; Elasticity cleavage
Description Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice-providing indications regarding crack initiation processes-is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses. (C) 2019 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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