Publication details

OVĚŘENÁ TECHNOLOGIE - Průmyslová příprava TiZrN vrstev

Title in English Proven technology - Industrial deposition of TiZrN coatings
Authors

SOCHORA Vjačeslav VAŠINA Petr

Year of publication 2021
Type Pilot plant, certified technology, variety, breed
MU Faculty or unit

Faculty of Science

Description The deposition technology of Ti_Zr_N coatings with enhanced fracture toughness is based on reactive magnetron sputtering of a rotating cylindrical target composed of titanium (Ti) and zirconium (Zr) segments.
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