Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures

• Authors: ZAJÍČKOVÁ Lenka; KRZYŽÁNKOVÁ Michaela; JANČA Jan
• Year of publication: 1995
• Type: Article in Proceedings
• Conference: Proceedings of 17th Symposium on Plasma Physics and Technology
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures

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