Publication details
Spectroscopic Ellipsometry of Slightly Rough Surfaces Covered by Layers
| Authors | |
|---|---|
| Year of publication | 1996 |
| Type | Article in Proceedings |
| Conference | ECASIA 95 - 6th European Conference on Applications of Surface and Interface Analysis |
| MU Faculty or unit | |
| Citation | |
| Web | http://hydra.physics.muni.cz/~franta/bib/ECASIA95_823.html |
| Field | Theoretical physics |
| Description | In this paper it will be shown that formulae for the ellipsometric parameters derived using the Rayleigh-Rice theory (RRT) can be used to determine the root-mean-square (rms) values of the heights sigma and the values of the autocorrelation lenghts T. |