Interakce supersonické plazmové trysky ve vf plazmochemickémreaktoru s podložkou

• Title in English: The interaction of the supersonic plasma jet with the substrate in the RF plasma chemical reactor
• Authors: ŠÍCHA Miloš; KAPIČKA Vratislav
• Year of publication: 1996
• Type: Article in Periodical
• Magazine / Source: Contributions to Plasma Physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

Related projects

• Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates