Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses

• Authors: ZAJÍČKOVÁ Lenka; OHLÍDAL Ivan; JANČA Jan
• Year of publication: 1996
• Type: Article in Periodical
• Magazine / Source: Thin Solid Films
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: PECVD; TEOS

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