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Publication details
Method of shearing interferometry for characterizing non-gaussian randomly rough surfaces
Authors | |
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Year of publication | 1996 |
Type | Article in Proceedings |
Conference | Specification, Production, and Testing of Optical Components and Systems |
MU Faculty or unit | |
Citation | |
web | http://hydra.physics.muni.cz/~franta/bib/SPIE2775_442.html |
Field | Optics, masers and lasers |
Description | In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centres taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square (RMS) values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined. |