ECR depozice tvrdých uhlíkových vrstev

• Title in English: ECR deposition of hard carbon films
• Authors: ČEŠKA Zbyněk; TÁLSKÝ Antonín; JANČA Jan
• Year of publication: 1997
• Type: Chapter of a book
• MU Faculty or unit: Faculty of Science

Related projects

• Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates