Technological application and spectral diagnostics of rf discharges

• Authors: MAŠEK Jaroslav; BRABLEC Antonín; BRABLEC Antonín
• Year of publication: 1997
• Type: Article in Proceedings
• Conference: Plasma physics and plasma technology
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma discharges; spectral diagnostics

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