Publication details
Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Article in Proceedings |
| Conference | 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma |
| MU Faculty or unit | |
| Citation | BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 192-195. ISBN 80-967454-6-8. |
| Field | Plasma physics |
| Keywords | mechanical properties; thin Films; PECVD |
| Description | Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions |