Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

• Authors: GRIM Jan; HOLÝ Václav; KUBĚNA Josef; STANGL J.; DARHUBER A.A.; ZERLAUTH S.; SCHÄFFLER F.; BAUER G.
• Year of publication: 1999
• Type: Article in Periodical
• Magazine / Source: Semicond. Sci. Technol.
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism

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