Publication details

A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

Authors

BEHNKE J.F. PASOTH E. CSAMBAL C. TICHÝ Milan KUDRNA Pavel TRUNEC David BRABLEC Antonín

Year of publication 1999
Type Article in Periodical
Magazine / Source Czech. Journal of Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords electron distribution function; magnetron; discharges
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