Characterisation of Silicon Oxide Thin Films Deposited by Plasma Enhanced CVD from Octamethylcyclotetrasiloxane/Oxygen Feeds

• Authors: ZAJÍČKOVÁ Lenka; JANČA Jan; PERINA Vratislav
• Year of publication: 1999
• Type: Article in Periodical
• Magazine / Source: Thin Solid Films
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: PECVD; OMTS
• Description: Characterisation of Silicon Oxide Thin Films Deposited by Plasma Enhanced CVD from Octamethylcyclotetrasiloxane/Oxygen Feeds

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