Publication details

Deposition of CNx Films in Inductively Coupled RF Discharge

Authors

ZAJÍČKOVÁ Lenka ELIÁŠ Marek BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal

Year of publication 1999
Type Article in Proceedings
Conference Proceedings of ICPIG XXIV
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Deposition of CNx Films in Inductively Coupled RF Discharge
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