Publication details
Deposition of CNx Films in Inductively Coupled RF Discharge
| Authors | |
|---|---|
| Year of publication | 1999 |
| Type | Article in Proceedings |
| Conference | Proceedings of ICPIG XXIV |
| MU Faculty or unit | |
| Citation | ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In Proceedings of ICPIG XXIV. 1999th ed. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, p. 41-42. |
| Field | Plasma physics |
| Description | Deposition of CNx Films in Inductively Coupled RF Discharge |
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