Publication details
Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system
| Authors | |
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| Year of publication | 2023 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications. |
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