Publication details

Ověřená technologie - prediktivní simulace ta-C procesu

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Title in English Proven technology - predictive simulation of ta-C process
Authors

OBRUSNÍK Adam MRÓZEK Kryštof KUBEČKA Martin ZIKÁN Petr HNILICA Jaroslav KLEIN Peter

Year of publication 2023
MU Faculty or unit

Faculty of Science

Description The resulting proven technology verifies the functionality of the PlasmaSolve company's computational framework (enhanced with a new ion transport model) for predictive simulation of the ta-C layer in a real industrial chamber during the process.
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