Publication details
Ověřená technologie - prediktivní simulace ta-C procesu
Title in English | Proven technology - predictive simulation of ta-C process |
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Authors | |
Year of publication | 2023 |
MU Faculty or unit | |
Description | The resulting proven technology verifies the functionality of the PlasmaSolve company's computational framework (enhanced with a new ion transport model) for predictive simulation of the ta-C layer in a real industrial chamber during the process. |
Related projects: |