Publication details
Erratum: “Optical spectroscopy for sputtering process characterization” [J. Appl. Phys. 127, 211101 (2020)]
| Authors | |
|---|---|
| Year of publication | 2024 |
| Type | Article in Periodical |
| Magazine / Source | Journal of Applied Physics |
| MU Faculty or unit | |
| Citation | |
| Web | https://pubs.aip.org/aip/jap/article/136/6/069904/3307369/Erratum-Optical-spectroscopy-for-sputtering |
| Doi | http://dx.doi.org/10.1063/5.0228273 |