Publication details
The ignition of low-pressure capacitively coupled discharge
| Authors | |
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| Year of publication | 2024 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | During the first stage of discharge ignition the electric field penetrates strongly the whole discharge region and the EEDF is non-Maxwellian with presence of electron groups with high energy. In the next stage the bulk plasma with weaker field and higher electron concentration develops, but the plasma potential in this stage is unusually high. The stabilisation of the plasma potential and the evolution of the DC bias is reached only after tens of microseconds, because the development of the electric asymmetry is controlled by the slow flow of ions. |
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