Publication details

Optical Characterization of Chalcogenide Thin Films

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Authors

FRANTA Daniel OHLÍDAL Ivan FRUMAR Miloslav JEDELSKÝ Jaroslav

Year of publication 2001
Type Article in Periodical
Magazine / Source Applied Surface Science
MU Faculty or unit

Faculty of Science

Citation
web http://hydra.physics.muni.cz/~franta/bib/ASS175_555.html
Field Solid matter physics and magnetism
Keywords Chalcogenide films; Dispersion model; Ellipsometry; Reflectometry
Description In this paper the optical characterization of a film of amorphous As-S chalcogenides evaporated on glass substrates will be performed using variable angle of incidence spectroscopic ellipsometry (VASE) and near normal incidence spectroscopic reflectometry (NNSR). The spectral dependences of the ellipsometric parameters and reflectance of the chalcogenide thin film mentioned is measured within the near-UV, visible and near-IR spectral regions. For interpreting these optical quantities the new dispersion model of the spectral dependences of the optical constants of amorphous solids is employed. This model is based on the modified Lorentz oscillator. Within this model the concepts of the band gap and Urbach tail are respected.
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