Publication details
SENSITIVITY EXTREMA IN MULTIPLE-ANGLE ELLIPSOMETRY
| Authors | |
|---|---|
| Year of publication | 1985 |
| Type | Article in Periodical |
| Magazine / Source | JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A |
| MU Faculty or unit | |
| Citation | |
| Field | Optics, masers and lasers |
| Description | A quantitative study of sensitivity of multiple-angle-of-incidence ellipsometry in determining several parameters of stratified structures is presented. |