Publication details

Spektroskopická elipsometrie slabě drsných povrchů

Title in English Spectroscopic Ellipsometry of Slightly Rough Surfaces
Authors

FRANTA Daniel OHLÍDAL Ivan HORA Jaroslav NAVRÁTIL Karel

Year of publication 1996
Type Article in Proceedings
Conference 12. konference českých a slovenských fyziků
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/KCSF96_482.html
Field Solid matter physics and magnetism
Description In this contribution we will show that equations for ellipsometric quantities and reflectance derived by us generalized Rayleigh-Rice theory (RRT) can be used for analysis of slightly rough thin layers.

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