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Publication details
Spektroskopická elipsometrie slabě drsných povrchů
Title in English | Spectroscopic Ellipsometry of Slightly Rough Surfaces |
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Authors | |
Year of publication | 1996 |
Type | Article in Proceedings |
Conference | 12. konference českých a slovenských fyziků |
MU Faculty or unit | |
Citation | |
Web | http://hydra.physics.muni.cz/~franta/bib/KCSF96_482.html |
Field | Solid matter physics and magnetism |
Description | In this contribution we will show that equations for ellipsometric quantities and reflectance derived by us generalized Rayleigh-Rice theory (RRT) can be used for analysis of slightly rough thin layers. |