Publication details
Optical Diagnostic of RF Plasma: Spectrometer Calibration and Actinometry
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | WDS`01 Proceeding of contributed papers, part 2 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | rf plasma; actinometry; spetrometer calibration |
| Description | In low pressure capacitively coupled rf oxygen discharge we use actinometry method to monitor the oxygen atom concentration. As actinometer we used small impurity of argon, oxygen-to-argon flow rate ratio 19:1. We measure actinometric signal, ie., atomic oxygen-to-argon line intensity, at a pressure 32.2 Pa and 100-400~W rf power range. An rf power increases the actinometric signal rises, which corresponds to the increase of the atomic oxygen concetration. To obtain real actinometric signal we needed to know the spectral response of the monochromator used (Triax 320 Jobin-Yvon with holographic difraction grating and CCD chip). Therefore the calibration of the spectrometer with the grey body radiation of tungsten standart (bulb with W strip) was performed. |