Publication details

Temperature Diagnostic of Polycarbonate Samples Treated in RF Capacitive Argon Plasma

Authors

SCHÄFER Jan JANČA Jan MEICHSNER Jurgen

Year of publication 2003
Type Article in Proceedings
Conference Proceedings XXVI ICPIG, Greifswald
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma diagnostics; plasma surface teratment; polycarbonate; capacitive RF argon plasma
Description polycarbonate samples were treated in low pressure capacitive coupled RF argon plasma. The surface temperature was continuously measured during plasma teratment. The contact angle and surface enrgies were determined in dependence on sample surface temperature.
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