Deposition of polymer films by rf plasma nozle at atmospheric pressure

• Authors: BURŠÍKOVÁ Vilma; SLAVÍČEK Pavel; BRABLEC Antonín; KAPIČKA Vratislav; KLÍMA Miloš
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Keywords: plasma deposition
• Description: Deposition of polymer films by 13.56 MHz plasma jet at atmospheric pressure.

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