Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films

• Authors: NAVRÁTIL Zdeněk; SŤAHEL Pavel; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; ČECH Jan; KUČEROVÁ Zuzana; TRUNEC David
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: WDS'03 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon
• Description: Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films

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