Measurement of the Species Spatial Distribution in an IPVD Reactor by Optical Spectroscopy

• Authors: VAŠINA Petr; DE POUCQUES Ludovic; BOISSE-LAPORTE Caroline; LEROY Olivier; PAGNON Daniel; TEULÉ-GAY Lionel; TOUZEAU Michel
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceeding of ISPC
• MU Faculty or unit: Rector's Office
• Field: Plasma physics