Publication details
Raman bands in microwave plasma assisted chemical vapour deposited films
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Periodical |
| Magazine / Source | Microelectronics Journal |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Microwave plasma assisted chemical vapour deposition; Diamond; Raman spectroscopy |
| Attached files | |
| Description | Raman spectroscopy is employed to characterize thin diamond films deposited by microwave plasma assisted chemical vapour deposition technique using a gas mixture of methane and hydrogen. The surface morfology of the films was analyzed by scanning electron microscopy. We have identified submicron crystals on (100) facets of diamond crystals which gave rise to bands in the Raman spectrum centred at 1170 and 1456 cm-1. |
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