Aberration integrals for the low-voltage foil corrector

• Authors: AKEN Rogier van; LENC Michal; BARTH James
• Year of publication: 2004
• Type: Article in Periodical
• Magazine / Source: Nuclear Instruments & Methods in Physics Research A
• MU Faculty or unit: Faculty of Science
• Field: Theoretical physics
• Keywords: Spherical aberration; Aberration integrals; Electron microscopy
• Description: The theory for the calculation of the aberrations of the low-voltage foil corrector is developed.

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