Thermal stability of coatings prepared in atmospheric pressure glow discharge

• Authors: ČECH Jan; SŤAHEL Pavel; ŠÍRA Martin; BURŠÍKOVÁ Vilma; NAVRÁTIL Zdeněk; TRUNEC David; BRABLEC Antonín
• Year of publication: 2004
• Type: Article in Periodical
• Magazine / Source: Czech. J. Phys.
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: thermal stability; atmospheric pressure glow discharge; deposition
• Description: In order to better understand the relations between the deposition conditions, the microstructure and hydrogen and/or nitrogen incorporation in polymeric films the thermal stability of coatings prepared in atmospheric pressure glow discharge was studied. The polymeric films were prepared from the mixture of hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ) with nitrogen in atmospheric pressure glow discharge (APGD). The hydrogen and/or nitrogen evolved from polymeric films were studied by TDS.

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