Publication details
Project of a clean room laboratory for silicon device technology at the Masaryk University
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Proceedings of International Conference Silicon-2004 |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | clean room; silicon; chip |
| Description | The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University. |
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