Publication details

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

Authors

BRANDEJSOVÁ Eva ČECHAL Jan BONAVENTUROVÁ ZRZAVECKÁ Olga NEBOJSA Alois TICHOPÁDEK Petr URBÁNEK Michal NAVRÁTIL Karel ŠIKOLA Tomáš HUMLÍČEK Josef

Year of publication 2004
Type Article in Periodical
Magazine / Source Jemná mechanika a optika
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords spectroscopic ellipsometry; poly(methyl-phenylsilane)
Description In the paper in situ monitoring of the UV-light-and thermal treatment of PMPSi thin films by real time spectroscopic ellipsometry and additional ex situ measurements are reported. In the in situ experiments the films were treated both under ultrahigh vacuum and oxygen atmosphere. The results of this study indicate systematic shift of the imaginary part of a complex dielectric function depending on the degree of treatment.

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