Fourier components of plasma potential in hydrogen capacitively coupled rf discharge

• Authors: DVOŘÁK Pavel; JANČA Jan
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: Proceedings of XXVII International Conference on Phenomena in Ionized Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma potential harmonic hydrogen
• Description: We measured the amplitudes of the fundamental and higher harmonics of the plasma potential in a low-pressure high frequency (13.56 MHz) hydrogen capacitively coupled discharge. Their dependencies on the position in the discharge and pressure are presented.

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