Influence of silicon, oxygen and nitrogen admixtures on the properies of plasma deposited amorphous diamond-like carbon coating

• Authors: BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka; DVOŘÁK Pavel; FRANTA Daniel; PEŘINA Vratislav; JANČA Jan
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: International Conference ELMECO-5, Book of Abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: DLC; protective coatings; PECVD
• Description: Modification of DLC coatings with silicon, oxygen and nitrogen admixtures, enhancement of mechanical properties,

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