Publication details
Spectroscopic analysis of a pulsed magnetron discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Periodical |
| Magazine / Source | Journal of Optoelectronics and Advanced Materials |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | pulsed magnetron; spatially resolved diagnostics; time resolved diagnostics; transport processes; preionisation |
| Description | To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed. |
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