Publication details

Infrared Response of Heavily Doped p-type Si and SiGe Alloys from Ellipsometric Measurements

Authors

HUMLÍČEK Josef KŘÁPEK Vlastimil

Year of publication 2005
Type Article in Proceedings
Conference CP772, Physics of Semiconductors: 27th International Conference on the Physics of Semiconductors
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords silico-germanium alloys; infrared ellipsometry
Description We report here ellipsometric spectra of Si and SiGe alloys heavily doped with boron. In the mid-infrared range, the response can be separated into the contributions of free-hole plasma and direct intervalence transitions. The first contribution extrapolates correctly to the zero-frequency resistance, the second is in a good agreement with the 8-band k.p calculation.
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