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Publication details
Infrared Response of Heavily Doped p-type Si and SiGe Alloys from Ellipsometric Measurements
Authors | |
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Year of publication | 2005 |
Type | Article in Proceedings |
Conference | CP772, Physics of Semiconductors: 27th International Conference on the Physics of Semiconductors |
MU Faculty or unit | |
Citation | |
Field | Solid matter physics and magnetism |
Keywords | silico-germanium alloys; infrared ellipsometry |
Description | We report here ellipsometric spectra of Si and SiGe alloys heavily doped with boron. In the mid-infrared range, the response can be separated into the contributions of free-hole plasma and direct intervalence transitions. The first contribution extrapolates correctly to the zero-frequency resistance, the second is in a good agreement with the 8-band k.p calculation. |
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