Publication details
PECVD a opracování povrchu materiálů v nízkotlakých výbojích
| Title in English | PECVD and treatment of surfaces in low pressure discharges |
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| Authors | |
| Year of publication | 2005 |
| Type | R&D Presentation |
| MU Faculty or unit | |
| Citation | |
| Description | The presentations covers plasma technologies used for deposition of thin films and treatment of surfaces. |
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